Chemistries for LED Manufacturing

DuPont offers a specific line of wet chemistries for LED manufacturing through our EKC Technology portfolio

The production of LED dies can require a variety of wet chemical treatments, and DuPont has put its science to work in formulating solutions for the LED industry designed to enable removal of positive- and negative-tone photoresists as well as plasma-hardened residues, and which are compatible with a wide variety of metals required to form LED contacts.

LED Fabrication Removers Portfolio

EKC162™ Plasma and Photoresist Residue Remover – copper compatible
Formulated to remove the most challenging organic- and plasma-based residues at low operating temperatures. Water-rinsable. Compatible with gallium arsenide (GaAs).

EKC175™ Plasma and Photoresist Residue Remover – aluminum compatible
Provides fast and efficient removal of plasma-basedresidues as photoresist. Water-rinsable.

EKC830™ Positive Tone Photoresist Remover
Photoresist removal product specifically targeted for positive-tone photoresists. Compatible with an exceptionally broad array of metals.

EKC922™ Negative Tone Photoresist Remover
Photoresist removal product specifically targeted for negative-tone photoresists. Compatible with gallium arsenide (GaAs) and an exceptionally broad array of metals.