Peter Trefonas, corporate fellow in DuPont's Electronics & Imaging business, was recognized for his significant inventions in photoresist materials and microlithography methods that underpin multiple generations of semiconductor manufacturing processes.
Pete was inducted into the National Academy of Engineering (NAE) on Sept. 30, 2018. The newly elected class was inducted at a formal ceremony during the NAE Annual Meeting in Washington, D.C. Pete is one of 83 new members and 16 foreign members nominated by their peers to be elected to the Academy this year, known as the highest professional engineering distinction.
The Academy recognizes engineers who have made significant contributions to "engineering research, practice or education; pioneering new and developing fields of technology; making major advancements in traditional fields of engineering; or developing and/or implementing innovative approaches to engineering education." Pete was recognized for his significant inventions in photoresist materials and microlithography methods that underpin multiple generations of semiconductor manufacturing processes.
Peter Trefonas, DuPont Fellow, Electronics & Imaging
Pete's career in the microelectronics industry has been fundamental to many of the inventions that enable semiconductor manufacturing today. He currently holds 88 US patents related to lithographic materials and processes, anti-reflective coatings, block copolymers, displays, dyes, OLEDs, photonics and nanomaterials.
A recognized author and speaker, Pete has been the recipient of the American Chemical Society's Heroes of Chemistry Award in 2014, and the Society of Chemical Industry Perkin Medal in 2016. Earlier in 2018, he was named a Fellow of SPIE, the international society for optics and photonics.
"Pete's accomplishments and the number of innovations resulting from his research have left an incredible impact on our business and our customers," said Cathie Markham, global R&D director, Electronics & Imaging. "He continually inspires our research and engineering teams to develop novel solutions to address industry challenges and consider new possibilities. We congratulate him on this outstanding recognition."
Among his numerous achievements in semiconductor lithography, Pete helped bring to market the first i-line photoresist product and safe-solvent photoresist offerings, and led projects in 193nm and 248nm photoresist formulations as well as organic bottom anti-reflectant coating formulations.